Mr. Yuhei Sumiyoshi
at Canon Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Image processing, Silicon, Distortion, Image sensors, Infrared radiation, Optical alignment, Semiconducting wafers, Wafer bonding, Overlay metrology

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Chromatic aberrations, Wavefronts, Wavefront aberrations, Control systems, Distortion, Projection systems, Transmittance, Critical dimension metrology, Photoresist processing, Fiber optic illuminators

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