Ms. Yuhong Zheng
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 10, 2003
Proc. SPIE. 5042, Design and Process Integration for Microelectronic Manufacturing
KEYWORDS: Data compression, Image compression, Speckle, Computer programming, Very large scale integration, Associative arrays, Scanning probe microscopy, Binary data, Chemical mechanical planarization, Algorithms

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