The SU8-based UV-LIGA process, which combines lithography with electroforming, is a low cost fabrication method
for producing MEMS and precision engineering parts. With lower surface energy and friction coefficient, these micro
parts are required for applications such as micro gears and movable microstructures. This paper introduces a technique to
fabricate Ni-PTFE micro parts using special treated galvanic bath. The experiment results show that the composite
electroforming process is robust and the fabricated Ni-PTFE parts have good tribological properties.