Dr. Yuhua Guo
at Chinese Univ of Hong Kong
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7269, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems IV
KEYWORDS: Fabrication, Microelectromechanical systems, Lithography, Particles, Composites, Nickel, Diffusion, Coating, Scanning electron microscopy, Convection

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