Yuji Shibasaki
at Tokyo Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Transparency, Magnesium, Polymers, Spectroscopy, Infrared spectroscopy, Photoresist materials, Polymerization, Chlorine, Vacuum ultraviolet, Chemically amplified resists

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