Mr. Yuki Soh
PhD Student at Kumamoto Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Semiconductors, Oxides, Silica, Dielectrics, Silicon, Reliability, Nondestructive evaluation, Transistors, Semiconducting wafers, Dielectric breakdown

PROCEEDINGS ARTICLE | December 7, 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Semiconductors, Optical fibers, Light sources, Electrodes, Dielectrics, Lamps, Nondestructive evaluation, Xenon, Semiconducting wafers, Light

PROCEEDINGS ARTICLE | December 24, 2011
Proc. SPIE. 8204, Smart Nano-Micro Materials and Devices
KEYWORDS: Actuators, Reticles, Optical lithography, Particles, Inspection, Ultrasonics, Scanning electron microscopy, Photomasks, Semiconductor manufacturing, Neodymium

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