Yukio Ohkubo
Supervisor at Anritsu Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 August 2003 Paper
Mutsumi Hara, Yoshiyuki Tanaka, Toshio Hayashi, Takaei Sasaki, Kiyoshi Kuwahara, Yukio Ohkubo, Nobuyuki Yoshioka, Noriyuki Harashima
Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504200
KEYWORDS: Photomasks, Etching, Dry etching, Plasma, Helium, Magnetism, Chromium, Scanning electron microscopy, Semiconductors, Lithography

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