Dr. Yumi Hatanaka
Assistant Manager at Tokuyama Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Transparency, Deep ultraviolet, Birefringence, Annealing, Crystals, Interfaces, Computer simulations, Convection, Laser crystals

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top