Ms. Yumiko Miyano Profile

Yumiko Miyano

at Toshiba Corp

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Publications (2)

Proceedings Article | 24 March 2008 Paper

Experiment and simulation of charging effects in SEM

S. Babin, S. Borisov, Y. Miyano, H. Abe, M. Kadowaki, A. Hamaguchi, Y. Yamazaki

Proceedings Volume 6922, 692219 (2008) https://doi.org/10.1117/12.772255

KEYWORDS: Monte Carlo methods, Silica, Scanning electron microscopy, Silicon, Optical simulations, Scattering, Electron beams, Laser scattering, Sensors, Electron transport

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Proceedings Article | 17 December 2003 Paper

Fine pixel CD-SEM for measurements of two-dimensional patterns

Shinji Yamaguchi, Masamitsu Itoh, Takahiro Ikeda, Yumiko Miyano, Tadashi Mitsui, Masuo Amma, Shoichi Horikawa

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518289

KEYWORDS: Scanning electron microscopy, Optical proximity correction, Image quality, Image acquisition, Head, Algorithm development, Semiconductors, Quality measurement, Photomasks, Electron beams

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