Yumiko Miyano
at Toshiba Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Electron beams, Silica, Scattering, Sensors, Silicon, Laser scattering, Scanning electron microscopy, Monte Carlo methods, Optical simulations, Electron transport

Proceedings Article | 17 December 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Semiconductors, Electron beams, Image acquisition, Quality measurement, Scanning electron microscopy, Head, Image quality, Photomasks, Optical proximity correction, Algorithm development

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