Dr. Yun-Seong Lee
at KAIST
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9054, Advanced Etch Technology for Nanopatterning III
KEYWORDS: Etching, Electrodes, Glasses, Skin, Dielectrics, Ions, Capacitance, Semiconducting wafers, Tellurium, Plasma

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