Yun Tao Jiang
at GLOBALFOUNDRIES Singapore
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Logic, Annealing, Laser processing, Distortion, Transistors, Semiconductor manufacturing, Optical alignment, Semiconducting wafers, Overlay metrology

SPIE Journal Paper | October 1, 2011
JM3 Vol. 10 Issue 04
KEYWORDS: Metrology, Scatterometry, Critical dimension metrology, Semiconducting wafers, Data modeling, Atomic force microscopy, Transmission electron microscopy, Inspection, 3D metrology

PROCEEDINGS ARTICLE | March 29, 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Metrology, Data modeling, Metals, Inspection, Atomic force microscopy, Transmission electron microscopy, Scatterometry, Critical dimension metrology, Semiconducting wafers

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