Proceedings Article | 22 October 2010
Yun Deng, Changling Yan, Yi Qu, Hui Li, Yuxia Wang, Xin Gao, Zhongliang Qiao, Mei Li, Bowen Qu, Peng Lu, Baoxue Bo
Proc. SPIE. 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology
KEYWORDS: Semiconductor lasers, Semiconducting wafers, Fiber amplifiers, Fiber lasers, Waveguides, Photoresist materials, Gyroscopes, Gallium arsenide, Silica, Quantum wells
Nowadays, with its mature progress, the 790 nm - 1000 nm wavelength semiconductor laser is widely used in the fields
of laser machining, laser ranging, laser radar, laser imaging, laser anti-counterfeit, biomedical and etc. Best of all, the
980 nm wavelength laser has its widespread application in the pumping source of Er3+ -doped fiber amplifier, optic fiber
gyroscopes and other devices. The output wavelength of the fiber amplifier which takes the 980 nm wavelength laser as
its pumping source is between 1060 nm and 1550 nm. This type of laser has its extremely wide range of applications in
optical communication and other fields. Moreover, some new application domains keep constantly being developed. The
semiconductor laser with the dual-channel ridge wave guide and the 980 nm emission wavelength is presented in this
paper. In our work, we fabricated Lasers with the using of multi-quantum well (MQW) wafer grew by MBE, and the PL-wavelength
of the MQW was 970 nm. The standard photofabrication method and the inductively coupled plasma (ICP)
etching technology are adopted in the process of making dual-channel ridge wave guide with the width of 4 μm and
height of 830 nm. In the state of continuous work at room temperature, the laser could output the single mode beam of 70
mW stably under the current of 100 mA. The threshold current of the laser diode is 17 mA and the slope efficiency is
0.89 W/A. The 3 dB spectrum bandwidth of the laser beam is 0.2 nm. This laser outputs its beam by a pigtail fiber on
which Bragg grating for frequency stabilization is carved. The laser diode, the tail fiber, and the built-in refrigeration and
monitoring modules are sealed in a 14-pin butterfly packaging. It can be used directly as the pumping source of Er3+ -
doped fiber amplifier or optic fiber gyroscopes.
