Dr. Yun Li
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 24 September 2015 Paper
Proc. SPIE. 9628, Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
KEYWORDS: Interferometers, Error analysis, Control systems, Optical testing, Humidity, Zernike polynomials, Zoom lenses, Testing and analysis, Environmental sensing, Active isolation

Proceedings Article | 16 October 2012 Paper
Proc. SPIE. 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Mirrors, Silica, Argon, Chemical species, Sputter deposition, Ions, Silicon, Ion beams, Solids, Tin

Proceedings Article | 16 November 2011 Paper
Proc. SPIE. 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Optical components, Photovoltaics, Error analysis, Ions, Computing systems, Control systems, Computer simulations, Ion beams, Motion models, Error control coding

Proceedings Article | 7 October 2010 Paper
Proc. SPIE. 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Photovoltaics, Spatial frequencies, Ions, Fourier transforms, Computer simulations, Gaussian filters, Ion beams, Deconvolution, Defense technologies, Ion beam finishing

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Lithography, MATLAB, Metrology, Optical spheres, Interferometers, Error analysis, Optical fabrication, Optical testing, Zernike polynomials, Motion analysis

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