Mr. Yun H. Wang
at Royal Melbourne Institute of Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Thin films, Optical lithography, Silicon, Chromium, Scanning electron microscopy, Laser ablation, Silicon films, Excimer lasers, Micromachining

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Thin films, Argon, Chemical species, Sputter deposition, Crystals, Magnetism, Oxygen, Thin film deposition, Thin film devices, Samarium

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