Mr. Yun H. Wang Profile

Yun H. Wang

at Royal Melbourne Institute of Technology

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Author

Publications (2)

Proceedings Article | 13 November 2002 Paper

Effect of argon gas pressure and substrate temperature on magnetic properties of magnetron-sputtered SmCo thin films

Yun Wang, Dinesh Sood, Muralihar Ghantasala

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.476346

KEYWORDS: Argon, Thin films, Oxygen, Magnetism, Thin film deposition, Samarium, Sputter deposition, Chemical species, Thin film devices, Crystals

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Proceedings Article | 13 November 2002 Paper

Patterning of magnetron sputtered SmCo films by excimer laser ablation

Yun Wang, Muralihar Ghantasala, Dinesh Sood, Erol Harvey

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.476351

KEYWORDS: Thin films, Laser ablation, Excimer lasers, Chromium, Silicon, Scanning electron microscopy, Optical lithography, Micromachining, Silicon films, Microelectromechanical systems

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