Yun Wang
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 19, 2005
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Thin films, Sensors, Electrodes, Metals, Silicon, Aluminum, Semiconducting wafers

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