Dr. Yun T. Zheng
Senior Engineer at NASA Goddard Space Flight Ctr
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 28 August 2010
Proc. SPIE. 7764, Nanoengineering: Fabrication, Properties, Optics, and Devices VII
KEYWORDS: Microelectromechanical systems, Gold, Oxides, Doppler effect, Sensors, Calibration, Electrodes, Silicon, Single walled carbon nanotubes, Electric field sensors

Proceedings Article | 12 May 2009
Proc. SPIE. 7318, Micro- and Nanotechnology Sensors, Systems, and Applications
KEYWORDS: Microelectromechanical systems, Packaging, Gold, Sensors, Calibration, Electrodes, Silicon, Scanning electron microscopy, Single walled carbon nanotubes, Electric field sensors

Proceedings Article | 20 September 2007
Proc. SPIE. 6687, UV/Optical/IR Space Telescopes: Innovative Technologies and Concepts III
KEYWORDS: Sensors, Electrodes, Metals, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Proceedings Article | 3 May 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Microelectromechanical systems, Electrodes, Metals, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Microelectromechanical systems, Electrodes, Metals, Indium, Silicon, Magnetism, Optical fabrication, Space telescopes, James Webb Space Telescope, Camera shutters

Showing 5 of 13 publications
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