Dr. Yunbo Zhang
at Univ of Shanghai for Science and Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Mirrors, Microlens array, Lithographic illumination, Control systems, Micromirrors, Photomasks, Optical simulations, Optical scanning systems, 193nm lithography

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Optical components, Lithography, Microlens array, Lithographic illumination, Diffractive optical elements, Polarization, Wave plates, Microlens, Micromirrors, 193nm lithography

PROCEEDINGS ARTICLE | November 16, 2011
Proc. SPIE. 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Confocal microscopy, Microscopes, Sensors, Tomography, Profilometers, Objectives, Micromirrors, Charge-coupled devices, Digital micromirror devices, Prototyping

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