Dr. Yunfei Deng
Principle Engineer at Siemens EDA
SPIE Involvement:
Publications (47)

Proceedings Article | 16 September 2022 Paper
Proceedings Volume 12325, 1232506 (2022) https://doi.org/10.1117/12.2640532
KEYWORDS: SRAF, Semiconducting wafers, Stochastic processes, Data modeling, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Calibration, Line width roughness

Proceedings Article | 22 February 2021 Paper
Proceedings Volume 11613, 116130H (2021) https://doi.org/10.1117/12.2584771
KEYWORDS: SRAF, 3D modeling, Printing, Data modeling, 3D printing

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 1161112 (2021) https://doi.org/10.1117/12.2583837
KEYWORDS: Optical proximity correction, Electron beam lithography, 3D modeling, Inspection, Calibration, Lithography, Data modeling, Time metrology, Semiconducting wafers, Scanning electron microscopy

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 1132524 (2020) https://doi.org/10.1117/12.2554527
KEYWORDS: Scanning electron microscopy, Data modeling, Calibration, Optical proximity correction, Semiconducting wafers, Metrology, Image processing, 3D modeling, Photomasks, Image quality

Proceedings Article | 20 March 2018 Presentation + Paper
Yaojun Du, Liang Li, Jingjing Zhang, Feng Shao, Christian Zuniga, Yunfei Deng
Proceedings Volume 10587, 105870Q (2018) https://doi.org/10.1117/12.2295451
KEYWORDS: Printing, Scattering, Data modeling, Optical proximity correction, Semiconducting wafers, Calibration, Binary data, Critical dimension metrology, Model-based design, Wafer-level optics

Showing 5 of 47 publications
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