Dr. Yung-Cheng Chang
Technology Dept Director at AZ Electronic Materials Taiwan Co Ltd
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | March 31, 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Optical lithography, Etching, Coating, Chemistry, Reflectivity, Semiconducting wafers, Natural surfaces, Yield improvement, Absorption

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Antireflective coatings, Reflection, Dry etching, Plasma etching, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Bottom antireflective coatings, Chemically amplified resists

PROCEEDINGS ARTICLE | August 29, 2002
Proc. SPIE. 4905, Materials and Devices for Optical and Wireless Communications
KEYWORDS: Fabry–Perot interferometers, Optical amplifiers, Modulation, Mode locking, Fiber lasers, Semiconductor lasers, Picosecond phenomena, Electro-optical engineering, Laser optics, Single sideband modulation

PROCEEDINGS ARTICLE | December 27, 2001
Proc. SPIE. 4490, Multifrequency Electronic/Photonic Devices and Systems for Dual-Use Applications
KEYWORDS: Reflectors, Mirrors, Clocks, Mode locking, Laser stabilization, Sapphire lasers, Photonic integrated circuits, Microwave radiation, Feedback control, Pulsed laser operation

PROCEEDINGS ARTICLE | October 19, 2001
Proc. SPIE. 4580, Optoelectronics, Materials, and Devices for Communications
KEYWORDS: Oscillators, Clocks, Distortion, Optoelectronics, Picosecond phenomena, Signal generators, Oscilloscopes, Electro optics, Microwave radiation, Phase shifts

PROCEEDINGS ARTICLE | October 17, 2001
Proc. SPIE. 4581, Passive Components and Transmission Systems
KEYWORDS: Tunable lasers, Mode locking, Laser applications, Fiber lasers, Optoelectronics, Picosecond phenomena, Microwave radiation, Pulsed laser operation, Phased array optics, Phase shifts

Showing 5 of 9 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top