Yung-Ming Chang
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 November 2002
Proc. SPIE. 4934, Smart Materials II
KEYWORDS: Microelectromechanical systems, Semiconductors, Oxides, Polishing, Particles, Silicon, Semiconducting wafers, Radium, Wafer bonding, Surface finishing

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