Dr. Yunpeng Song
at Tianjin Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 15, 2015
Proc. SPIE. 9673, AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques
KEYWORDS: Actuators, Microscopes, Calibration, Silicon, Manufacturing, Atomic force microscopy, Head, Aluminum, Atomic force microscope, Electromagnetism

PROCEEDINGS ARTICLE | October 10, 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Microscopes, Imaging systems, Metals, Copper, Magnetism, Finite element methods, Vibration isolation, Environmental sensing, Systems modeling, Scanning tunneling microscopy

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