Deformable mirrors are at the heart of any adaptive optics system. We present the results of tests of deformable mirrors from Microscale. One of the key innovations of these deformable mirrors is that the facesheet is created from a silicon on insulator (SOI) wafer with integral posts for mechanical linkage to the actuators. This dramat- ically reduces the variability of the influence function. The facesheet is bonded to an array of piezoelectric stack actuators. The actuators are currently PZT, but single crystal PMN actuators are being developed. We present results of optical and electrical tests of the performance of the DM.
The development of compact, high performance Deformable Mirrors (DMs) is one of the most important technological challenges for high-contrast imaging on space missions. Microscale Inc. has fabricated and characterized piezoelectric stack actuator deformable mirrors (PZT-DMs) and Application-Specific Integrated Circuit (ASIC) drivers for direct integration. The DM-ASIC system is designed to eliminate almost all cables, enabling a very compact optical system with low mass and low power consumption. We report on the optical tests used to evaluate the performance of the DM and ASIC units. We also compare the results to the requirements for space-based high-contrast imaging of exoplanets.