Dr. Yuri Paskover
R&D Scientist at KLA-Tencor Israel
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Metrology, Optical lithography, Modulation, Polarization, Image segmentation, Manufacturing, Critical dimension metrology, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | September 20, 2004
Proc. SPIE. 5448, High-Power Laser Ablation V
KEYWORDS: Ultrafast phenomena, Femtosecond phenomena, Spectroscopy, Electrons, Silicon, Diagnostics, Atomic force microscopy, Laser ablation, Picosecond phenomena, Tellurium

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