Dr. Yuri S. Uritsky
Director at Applied Materials Inc
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | June 3, 2010
Proc. SPIE. 7729, Scanning Microscopy 2010
KEYWORDS: Oxides, Thin films, Optical spheres, Etching, Quartz, Particles, Silicon, Image resolution, Adaptive optics, Atomic force microscopy

PROCEEDINGS ARTICLE | March 25, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Lithography, Polishing, Etching, Particles, Chemistry, Manufacturing, Inspection, Immersion lithography, Semiconducting wafers, Surface finishing

PROCEEDINGS ARTICLE | August 27, 1999
Proc. SPIE. 3884, In-Line Methods and Monitors for Process and Yield Improvement
KEYWORDS: Statistical analysis, Defect detection, Imaging systems, Scanners, Particles, Scanning electron microscopy, Navigation systems, Optical alignment, Semiconducting wafers, Yield improvement

PROCEEDINGS ARTICLE | August 27, 1998
Proc. SPIE. 3509, In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II
KEYWORDS: Wafer-level optics, Statistical analysis, Defect detection, Scanners, Particles, Light scattering, Laser marking, Atomic force microscopy, Scanning electron microscopy, Semiconducting wafers

PROCEEDINGS ARTICLE | May 27, 1996
Proc. SPIE. 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995
KEYWORDS: Confocal microscopy, Microscopes, Metals, Particles, Luminescence, Ceramics, Chromium, Scanning electron microscopy, Micro raman spectroscopy, Aluminum

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