Yury V. Larionov
R&D at General physics institute
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 8 January 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Nanostructures, Data modeling, Silicon, Physics, Electron microscopes, Scanning electron microscopy, Optical inspection, Detection theory, Selenium, Nanoelectronics

Proceedings Article | 8 January 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Mathematical modeling, Data modeling, Scattering, Sensors, Calibration, Image acquisition, Electron microscopes, Image registration, Scanning electron microscopy, Nanoelectronics

Proceedings Article | 8 January 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Electron beams, Contamination, Image processing, Particles, Crystals, Silicon, Diffusion, Distortion, Scanning electron microscopy, Raster graphics

Proceedings Article | 8 January 2013
Proc. SPIE. 8700, International Conference Micro- and Nano-Electronics 2012
KEYWORDS: Nanotechnology, Software, Clocks, Calibration, Image acquisition, Electron microscopes, Scanning electron microscopy, Monte Carlo methods, Device simulation, Instrument modeling

Proceedings Article | 31 July 2007
Proc. SPIE. 6728, ICONO 2007: Novel Photonics Materials; Optics and Optical Diagnostics of Nanostructures
KEYWORDS: Switches, Silica, Chemical species, Glasses, Laser irradiation, Raman scattering, Silicate glass, Phosphosilicate glass, Polysomnography, Absorption

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