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Yuseong Jang
Process Engineer at Lam Research Korea Technology
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Publications (1)
Proceedings Article | 4 March 2011 Paper
Measurement of nonuniform bowing in GaN/sapphire epi-wafers and subsequent stress analysis by using a theoretical model
Proceedings Volume 7939, 79392B (2011) https://doi.org/10.1117/12.874127
KEYWORDS: Semiconducting wafers, Light emitting diodes, Gallium nitride, Data modeling, Stress analysis, Sapphire, Sensors, Optical properties, Luminescence, 3D image processing
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