Mr. Yusuke Kasahara
at EUVL Infrastructure Development Ctr Inc
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | April 4, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Polymethylmethacrylate, Etching, Annealing, Line width roughness, Directed self assembly, Chemical analysis, Epitaxy, Line edge roughness, Edge roughness

PROCEEDINGS ARTICLE | April 1, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Etching, Polymers, Silicon, Electron microscopes, Transmission electron microscopy, Surface properties, Directed self assembly, Reactive ion etching, Molecular self-assembly

PROCEEDINGS ARTICLE | April 1, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Semiconductors, Electron beam lithography, Metrology, Optical lithography, Silica, Etching, Metals, Manufacturing, Scanning electron microscopy, Photomasks, Directed self assembly, Semiconductor manufacturing, Epitaxy, Reactive ion etching, Photoresist processing, Semiconducting wafers, Tin, Chemical mechanical planarization

PROCEEDINGS ARTICLE | March 23, 2016
Proc. SPIE. 9782, Advanced Etch Technology for Nanopatterning V
KEYWORDS: Semiconductors, Lithography, Optical lithography, Silica, Polymers, Metals, Silicon, Manufacturing, Scanning electron microscopy, Photomasks, Directed self assembly, Semiconductor manufacturing, Reactive ion etching, Chemical mechanical planarization

SPIE Journal Paper | April 9, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Etching, Polymethylmethacrylate, Optical lithography, Silicon, Polymers, Lithography, Scanning electron microscopy, Image processing, Polymerization, Directed self assembly

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Lithography, Etching, Metals, Scanning electron microscopy, Directed self assembly, Picosecond phenomena, Optical alignment, Reactive ion etching, Photoresist processing, Semiconducting wafers

Showing 5 of 8 publications
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