Dr. Yusuke Oniki
at imec
SPIE Involvement:
Publications (6)

SPIE Journal Paper | 2 August 2023 Open Access
Janusz Bogdanowicz, Yusuke Oniki, Karine Kenis, Pallavi Puttarame Gowda, Hans Mertens, Basel Shamieh, Yonatan Leon, Matthew Wormington, Juliette Van der Meer, Anne-Laure Charley
JM3, Vol. 22, Issue 03, 034001, (August 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.034001
KEYWORDS: Germanium, Gallium arsenide, Transmission electron microscopy, Semiconducting wafers, Nanosheets, X-rays, Silicon, Etching, Transistors, Fluorescence

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC1205604 (2022) https://doi.org/10.1117/12.2613723
KEYWORDS: Field effect transistors, Etching, Dry etching, Very large scale integration, Isotropic etching, Dielectrics, Gallium arsenide, Transistors, Superlattices, Sodium

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC1205608 (2022) https://doi.org/10.1117/12.2615984
KEYWORDS: Optical lithography, Etching, Dielectrics, Silicon, Metals, Wafer bonding, Transistors, Surface roughness, Semiconducting wafers, Photomasks

Proceedings Article | 22 February 2021 Presentation + Paper
J. Bogdanowicz, Y. Oniki, K. Kenis, Y. Muraki, T. Nuytten, S. Sergeant, A. Franquet, V. Spampinato, T. Conard, I. Hoflijk, J. Meersschaut, N. Claessens, A. Moussa, D. Van Den Heuvel, J. Hung, R. Koret, A.-L. Charley, P. Leray
Proceedings Volume 11611, 116111Q (2021) https://doi.org/10.1117/12.2581800
KEYWORDS: Etching, Metrology, Transistors, Spectroscopes, Raman spectroscopy, Critical dimension metrology, Spectroscopy, Photoemission spectroscopy, X-rays, Scanning electron microscopy

Proceedings Article | 24 March 2020 Presentation
Proceedings Volume 11329, 113290Q (2020) https://doi.org/10.1117/12.2550539
KEYWORDS: Silicon, Fin field effect transistors, Gallium arsenide, Critical dimension metrology, Plasma, Field effect transistors, Etching, Line edge roughness, Line width roughness, Transistors

Showing 5 of 6 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top