Dr. Yusuke Saito
at Nikon Corp
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 5 June 2023
JM3, Vol. 22, Issue 04, 041403, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041403
KEYWORDS: Semiconducting wafers, Spatial light modulators, Deep ultraviolet, Optical proximity correction, UV optics, Solid state lasers, Pulsed laser operation, Lithography, Chip manufacturing, Printing

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940A (2023) https://doi.org/10.1117/12.2657730
KEYWORDS: Semiconducting wafers, Scanners, Optical proximity correction, Optical lithography, Laser scanners, Semiconductors, Printing, Solid state lasers, Fabrication, Chip manufacturing

Proceedings Article | 1 December 2022 Poster + Paper
Yuho Kanaya, Yoji Watanabe, Yusuke Saito, Toshiaki Sakamoto, Ryota Matsui, Yosuke Okudaira, Shunsuke Kibayashi, Koshi Komuro, Hiroyuki Tsukamoto, Soichi Owa, Thomas Koo, David Tseng, Conrad Sorensen, Sujuan Li, Stephen Renwick, Noriyuki Hirayanagi, Bausan Yuan
Proceedings Volume 12293, 122930U (2022) https://doi.org/10.1117/12.2641419
KEYWORDS: Scanners, Data conversion, Photomasks, Spatial light modulators, Optical proximity correction, Raster graphics, Semiconducting wafers, Phase shifts, Deep ultraviolet, Maskless lithography

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12051, 1205108 (2022) https://doi.org/10.1117/12.2613902
KEYWORDS: Semiconducting wafers, Photomasks, Scanners, Data conversion, Spatial light modulators, Printing, Deep ultraviolet, Semiconductors, Optical lithography, Solid state lasers

Proceedings Article | 12 October 2021 Presentation + Paper
Proceedings Volume 11855, 1185508 (2021) https://doi.org/10.1117/12.2600898
KEYWORDS: Spatial light modulators, Projection systems, Scanners, Semiconducting wafers, Digital imaging, Image resolution, Raster graphics, Photomasks, Micromirrors

Showing 5 of 6 publications
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