Yusuke Satoh
at Tohoku Instutute of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Nanotechnology, Thin films, Lithography, Resonators, Silica, Signal attenuation, Electrodes, Wave propagation, Transducers, Acoustics

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