Mr. Yuta Chihara Profile

Yuta Chihara

at Advantest Corp

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Publications (3)

Proceedings Article | 9 September 2013 Paper

SEM image quality enhancement technology for bright field mask

Naoki Fukuda, Yuta Chihara, Soichi Shida, Keisuke Ito

Proceedings Volume 8880, 88801C (2013) https://doi.org/10.1117/12.2029786

KEYWORDS: Scanning electron microscopy, Photomasks, Optical lithography, Selenium, Line scan image sensors, Metrology, Opacity, Glasses, Sensors, Image quality

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Proceedings Article | 30 June 2012 Paper

New CDSEM technology and its performance for multiple patterning process

Yuta Chihara, Keisuke Ito, Masayuki Kuribara, Toshimichi Iwai, Soichi Shida, Masahiro Seyama, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 8441, 844109 (2012) https://doi.org/10.1117/12.964404

KEYWORDS: Scanning electron microscopy, Photomasks, Metrology, Electron beam lithography, Line scan image sensors, Electron beams, Lithography, Semiconductors, Capacitance, Absorption

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Proceedings Article | 25 September 2010 Paper

A new CDSEM metrology method for thin film hardmasks patterns using multiple detectors

Sumito Harada, Yuta Chihara, Motoji Hirano, Toshi Iwai, Masayuki Kuribara, Ikuo Iko, Masahiro Seyama, Jun Matsumoto, Takayuki Nakamura

Proceedings Volume 7823, 78233H (2010) https://doi.org/10.1117/12.864171

KEYWORDS: Sensors, Thin films, Detection and tracking algorithms, Algorithm development, Metrology, Double patterning technology, Electron beams, Scanning electron microscopy, Photomasks, Binary data

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