Yuta Togashi
at Mitsubishi Gas Chemical Co Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 October 2018 Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Extreme ultraviolet, Absorption, Transmittance, Chemical elements, Iodine, Extreme ultraviolet lithography, Mass attenuation coefficient, Resist chemistry

Proceedings Article | 16 October 2017 Paper
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Extreme ultraviolet, Absorption, Extreme ultraviolet lithography, Lithography

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