Yuta Togashi
at Mitsubishi Gas Chemical Co Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Iodine, Transmittance, Extreme ultraviolet, Extreme ultraviolet lithography, Chemical elements, Mass attenuation coefficient, Resist chemistry, Absorption

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Absorption

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