Yutaka Kanakutsu
at (Kabu) Nikon Kumagayaseisakusho;Nikon Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Actuators, Reticles, Calibration, Scanners, Wavefronts, Control systems, Deformable mirrors, Distortion, Feedback control, Automatic control

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