Dr. Yutaka Nagata
at RIKEN
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 13 July 2017 Paper
Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Microscopes, Diffraction, Mirrors, Phase shift keying, CCD cameras, Scatterometry, Photomasks, Extreme ultraviolet, Charge-coupled devices, Extreme ultraviolet lithography

Proceedings Article | 9 July 2015 Paper
Proc. SPIE. 9658, Photomask Japan 2015: Photomask and Next-Generation Lithography Mask Technology XXII
KEYWORDS: Microscopes, Diffraction, Mirrors, CCD cameras, Scatterometry, 3D metrology, Relays, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 30 September 2013 Paper
Proc. SPIE. 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X
KEYWORDS: Microscopes, Diffraction, Mirrors, Light sources, Inspection, Scatterometry, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation

Proceedings Article | 28 June 2013 Paper
Proc. SPIE. 8701, Photomask and Next-Generation Lithography Mask Technology XX
KEYWORDS: Lithography, Microscopes, Diffraction, Coherence imaging, Mirrors, CCD cameras, Phase imaging, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 30 June 2012 Paper
Proc. SPIE. 8441, Photomask and Next-Generation Lithography Mask Technology XIX
KEYWORDS: Microscopes, Diffraction, Optical filters, Mirrors, CCD cameras, Scatterometry, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Zirconium

Showing 5 of 11 publications
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