Dr. Yuichiro Yamazaki
Manager
SPIE Involvement:
Author
Publications (40)

SPIE Journal Paper | 2 October 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Metrology, Scatterometry, X-rays, Nondestructive evaluation, Scattering, Scanning electron microscopy, Semiconducting wafers, Etching, Scatter measurement, Silicon

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Scattering, X-rays, Silicon, Inspection, Nondestructive evaluation, Scatterometry, Semiconducting wafers, Scatter measurement, Signal detection

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Calibration, Image processing, Polarizers, Image analysis, Optical testing, Scatterometry, Data processing, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 8 November 2012
Proc. SPIE. 8522, Photomask Technology 2012
KEYWORDS: Signal to noise ratio, Defect detection, Particles, Inspection, Image acquisition, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Performance modeling, Systems modeling

Proceedings Article | 14 October 2011
Proc. SPIE. 8166, Photomask Technology 2011
KEYWORDS: Signal to noise ratio, Sensors, Particles, Inspection, Image acquisition, Electron microscopes, Scanning electron microscopy, Optical inspection, Image quality, Extreme ultraviolet

Showing 5 of 40 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top