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Yuxin Cheng
at National Key Laboratory of Science and Technology
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Author
Publications (1)
Proceedings Article | 24 November 2016 Paper
Performance analysis of three-dimensional surface profilometry using a MEMS mirror
Proceedings Volume 10023, 100230D (2016) https://doi.org/10.1117/12.2254870
KEYWORDS: Microelectromechanical systems, Mirrors, Fringe analysis, 3D metrology, Phase shifting, Phase shift keying, Mathematical modeling, Phase shifts, Charge-coupled devices, Data processing
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