Zr-Al co-doped ZnO (AZZO) were prepared by DC magnetron sputtering on glass slide substrates
under different sputtering powers. Microstructure, Electrical and optical properties of AZZO thin films were
investigated. The AZZO films with an electrical resistivity as low as 1.07x10<sup>-3</sup>Ωcm and an average optical
transmission of 88.5% in the visible range were obtained at DC power of 170 W. The optical bandgap depends
on the deposition condition, and was in the range of 3.48-3.57 eV. These results make the possibility for light emitting diodes(LEDs) and solar cells with AZZO films as transparent electrodes.