Prof. Yuzo Shinozuka
professor at Wakayama University
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 3, 2013
Proc. SPIE. 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
KEYWORDS: Semiconductors, Chemical species, Annealing, Molecules, Crystals, Electrons, Silicon, Distortion, Solids, Excitons

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