Dr. Yveline Gobil
at CEA-LETI
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 15 July 2008 Paper
Proc. SPIE. 7011, Space Telescopes and Instrumentation 2008: Ultraviolet to Gamma Ray
KEYWORDS: Bolometers, Astronomy, Sensors, X-rays, Indium, Silicon, Tantalum, X-ray astronomy, Semiconducting wafers, X-ray technology

Proceedings Article | 15 January 2003 Paper
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Oxides, Etching, Argon, Polymers, Silicon, Chemistry, Oxygen, Photoresist materials, Photomasks, Carbon monoxide

Proceedings Article | 4 September 1998 Paper
Proc. SPIE. 3508, Multilevel Interconnect Technology II
KEYWORDS: Lithography, Metals, Copper, Dielectrics, Interfaces, Silicon, Reflectivity, Critical dimension metrology, Standards development, Absorption

Proceedings Article | 29 June 1998 Paper
Proc. SPIE. 3333, Advances in Resist Technology and Processing XV
KEYWORDS: Lithography, Metals, Copper, Tungsten, Dielectrics, Interfaces, Silicon, Reflectivity, Critical dimension metrology, Absorption

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top