Dr. Yves Pétremand
at Ctr Suisse d'Electronique et de Microtechnique SA
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Mirrors, Laser therapeutics, Etching, Scanners, Silicon, Endoscopes, Deep reactive ion etching, Wafer bonding

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Oxides, Mirrors, Waveguides, Sensors, Etching, Silicon, Temperature sensors, Microopto electromechanical systems, Electromagnetism

PROCEEDINGS ARTICLE | March 13, 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Packaging, Mirrors, Silica, Electrodes, Silicon, Signal processing, Micromirrors, Medium wave, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Light sources, Electrodes, Dielectrics, Reliability, Lamps, Atomic clocks, Microfabrication, Optical pumping, Rubidium, Plasma

PROCEEDINGS ARTICLE | April 28, 2010
Proc. SPIE. 7720, Semiconductor Lasers and Laser Dynamics IV
KEYWORDS: Glasses, Ions, Silicon, Semiconductor lasers, Laser stabilization, Vertical cavity surface emitting lasers, Microfabrication, Semiconducting wafers, Rubidium, Absorption

PROCEEDINGS ARTICLE | October 10, 2007
Proc. SPIE. 6715, Optomechatronic Actuators and Manipulation III
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Beam steering, Scanners, Silicon, Semiconductor lasers, Optical simulations, Beam shaping, Optical alignment

Showing 5 of 8 publications
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