Dr. Zachary Adam Levinson
at Synopsys Inc
SPIE Involvement:
Author
Area of Expertise:
Microlithography , Aberration extraction
Publications (12)

PROCEEDINGS ARTICLE | October 9, 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Lithography, Monochromatic aberrations, Metrology, Principal component analysis, Detection and tracking algorithms, Imaging systems, Wavefronts, Extreme ultraviolet lithography, Critical dimension metrology, Semiconducting wafers

SPIE Journal Paper | June 19, 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Systems modeling, Data modeling, Lithography, Tolerancing, Binary data, Photomasks, Image transmission, Semiconductors, Reticles

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Monochromatic aberrations, Metrology, Principal component analysis, Patents, Image resolution, Wavefronts, Image analysis, Zernike polynomials, Objectives, Extreme ultraviolet, Extreme ultraviolet lithography, Spherical lenses, Binary data, EUV optics

SPIE Journal Paper | June 28, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Zernike polynomials, Extreme ultraviolet lithography, Extreme ultraviolet, Monochromatic aberrations, Imaging systems, Photomasks, Wavefronts, Metrology, Microscopes, Statistical analysis

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Diffraction, Monochromatic aberrations, Point spread functions, Deep ultraviolet, 3D modeling, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Systems modeling, 3D image processing, Phase shifts

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Monochromatic aberrations, Metrology, Principal component analysis, Data modeling, Image processing, Wavefronts, Computer simulations, Image analysis, Software development, Image filtering, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Photomicroscopy

Showing 5 of 12 publications
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