Zahra Heidarnia-Fathabad
at Univ Twente
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 October 2018 Presentation + Paper
Proceedings Volume 10810, 108100C (2018) https://doi.org/10.1117/12.2501799
KEYWORDS: Material characterization, Photomasks, Extreme ultraviolet, Metals, Tellurium, Extreme ultraviolet lithography, Refractive index

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