Zahra Hosseinimakarem
Optical Metrology Engineer at Micron
SPIE Involvement:
Author
Area of Expertise:
Metrology , Photolithography , Surface characterization , Zernike polynomials , Diffractive optics
Publications (6)

Proceedings Article | 23 August 2017 Presentation + Paper
Proc. SPIE. 10373, Applied Optical Metrology II
KEYWORDS: Optical components, Optical design, Scattering, Wavefronts, Zernike polynomials, Modulation transfer functions, Freeform optics

Proceedings Article | 26 September 2016 Paper
Proc. SPIE. 9961, Reflection, Scattering, and Diffraction from Surfaces V
KEYWORDS: Fabrication, Superposition, Polishing, Optical spheres, Spatial frequencies, Germanium, Zernike polynomials, Raster graphics, Freeform optics, Received signal strength

Proceedings Article | 18 August 2014 Paper
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Polishing, Metrology, Spatial frequencies, Error analysis, Wavefronts, Adaptive optics, Image quality, Reconstruction algorithms, Freeform optics, Surface finishing

SPIE Journal Paper | 22 November 2012
JM3 Vol. 11 Issue 4
KEYWORDS: Surface roughness, Photoresist materials, Spiral phase plates, Lithography, Additive manufacturing, Optical components, Photoresist developing, Optical vortices, Photoresist processing, Ultraviolet radiation

Proceedings Article | 15 February 2012 Paper
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Optical components, Lithography, Surface roughness, Additive manufacturing, Photoresist materials, Optical vortices, Radium, Spiral phase plates, Photoresist developing, Picture Archiving and Communication System

Showing 5 of 6 publications
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