Mr. Guowei Zhang Profile

Guowei Zhang

at Jiaxing Yuguang Technology Development Co Ltd

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Publications (2)

Proceedings Article | 20 December 2019 Paper

Inverse optimization for designing wide angle diffractive optical element

Guowei Zhang, Qiang Song, Lixin Wei, Xiaodong Yin

Proceedings Volume 11209, 112092G (2019) https://doi.org/10.1117/12.2548299

KEYWORDS: Diffraction, Diffractive optical elements, Optimization (mathematics), Genetic algorithms, Optical design, Beam splitters, Diffraction gratings, Lithography

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Proceedings Article | 18 November 2019 Open Access

Improvements of diffractive optical element uniformity and zero order performance using lithographic process parameter optimization method (withdrawal notice)

Guowei Zhang, Xiaodong Yin, Kehan Tian

Proceedings Volume 11188, 111880X (2019) https://doi.org/10.1117/12.2535466

KEYWORDS: Diffractive optical elements, Lithography, Critical dimension metrology, Diffraction, Optical alignment, Plasma etching, Optical fabrication, Device simulation, Nanoimprint

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