Guowei Zhang
at Jiaxing Yuguang Technology Development Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 December 2019 Paper
Proc. SPIE. 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019)
KEYWORDS: Lithography, Diffraction, Optical design, Beam splitters, Genetic algorithms, Diffractive optical elements, Optimization (mathematics), Diffraction gratings

Proceedings Article | 18 November 2019 Paper
Proc. SPIE. 11188, Holography, Diffractive Optics, and Applications IX
KEYWORDS: Lithography, Diffraction, Diffractive optical elements, Optical fabrication, Plasma etching, Optical alignment, Critical dimension metrology, Device simulation, Nanoimprint

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