Mr. Zhang Tao
at HIT
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Mathematical modeling, Diffraction, Error analysis, Computer simulations, Optoelectronics, Algorithm development, Optimization (mathematics), Arsenic, Chemical mechanical planarization, Diffraction gratings

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