Prof. Zhanshan Wang Profile

Prof. Zhanshan Wang

Head of Institute at Tongji Univ

SPIE Involvement:

Fellow status | Conference Program Committee | Conference Chair | Author

Publications (105)

PROCEEDINGS ARTICLE | July 6, 2018

Current progress of x-ray multilayer telescope optics based on thermally slumping glass for eXTP mission

Proc. SPIE. 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Mirrors, Multilayers, X-ray optics, Glasses, X-rays, Ray tracing, Spatial resolution, X-ray telescopes, Prototyping

PROCEEDINGS ARTICLE | June 15, 2018

Simulation of defect-induced scattering in multilayer coatings

Proc. SPIE. 10692, Optical Fabrication, Testing, and Metrology VI

KEYWORDS: Diffraction, Multilayers, Finite-difference time-domain method, Scattering, Light scattering, Optical coatings, Laser scattering, Mie scattering, Tantalum

PROCEEDINGS ARTICLE | June 5, 2018

Optimal design and fabrication of multilayer antireflection coating for III-V quadruple-junction solar cells

Proc. SPIE. 10691, Advances in Optical Thin Films VI

KEYWORDS: Oxides, Antireflective coatings, Multilayers, Solar cells, Ions, Reflectivity, Transmission electron microscopy, Tantalum, Absorption, Oxidation

PROCEEDINGS ARTICLE | June 5, 2018

Ultra-broadband perfect absorber based on successive nano-Cr-film

Proc. SPIE. 10691, Advances in Optical Thin Films VI

KEYWORDS: Photovoltaics, Multilayers, Reflection, Metals, Dielectrics, Reflectivity, Chromium, Transmittance, Optics manufacturing, Absorption

PROCEEDINGS ARTICLE | June 5, 2018

High reflectance broadband thin films used in x-ray telescopes

Proc. SPIE. 10691, Advances in Optical Thin Films VI

KEYWORDS: Carbon, Thin films, Telescopes, Mirrors, Metals, X-rays, Reflectivity, Platinum, X-ray telescopes, Absorption

PROCEEDINGS ARTICLE | June 5, 2018

Multilayer enhanced metasurfaces with high efficiency and additional functionalities

Proc. SPIE. 10691, Advances in Optical Thin Films VI

KEYWORDS: Metamaterials, Optical components, Metals, Interfaces, Reflectivity, Antennas, Geometrical optics, Nanophotonics, Beam controllers

PROCEEDINGS ARTICLE | June 5, 2018

Improvement to the LIDT of high-reflection coatings by planarization of nodular defects

Proc. SPIE. 10691, Advances in Optical Thin Films VI

KEYWORDS: Multilayers, Silica, Etching, Coating, Resistance, Scanning electron microscopy, Ion beams, High reflection coatings

PROCEEDINGS ARTICLE | May 8, 2018

Micro-structured optical coatings: periodic-array enhanced functionalities

Proc. SPIE. 10627, Advanced Optics for Defense Applications: UV through LWIR III

KEYWORDS: Gold, Nanotechnology, Plasmonics, Diffraction, Multilayers, Reflection, Dielectrics, Optical coatings, Reflectivity, Dielectric polarization

PROCEEDINGS ARTICLE | November 23, 2017

HfO2-SiO2 mixed film deposited by Ion Assisted Deposition Coevaporation

Proc. SPIE. 10447, Laser-Induced Damage in Optical Materials 2017

KEYWORDS: Refractive index, Scattering, Annealing, Optical coatings, Laser scattering, Doping, Absorption

PROCEEDINGS ARTICLE | November 13, 2017

Optimal coating solution for the total internal reflection surface of zig-zag slab laser amplifier

Proc. SPIE. 10447, Laser-Induced Damage in Optical Materials 2017

KEYWORDS: Thin films, Reflection, Laser induced damage, Interfaces, Coating, Nd:YAG lasers, Laser amplifiers

PROCEEDINGS ARTICLE | September 7, 2017

Development of relative angle determinable stitching interferometry for high-accuracy x-ray focusing mirrors

Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII

KEYWORDS: Optical components, Mirrors, Nano opto mechanical systems, Interferometers, X-rays, Interferometry, Synchrotrons, Spherical lenses, Stitching interferometry, Fizeau interferometers

PROCEEDINGS ARTICLE | September 6, 2017

The thickness correction of sol-gel coating using ion-beam etching in the preparation of antireflection coating

Proc. SPIE. 10356, Nanostructured Thin Films X

KEYWORDS: Nanostructures, Antireflective coatings, Etching, Coating, Ion beams, Sol-gels, Forward error correction, Thin film manufacturing

PROCEEDINGS ARTICLE | August 29, 2017

Design and simulations of a short optical baffle for the Lightweight Asymmetry and Magnetism Probe (LAMP)

Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII

KEYWORDS: Telescopes, Optical design, Magnetism, Space telescopes, Geometrical optics, Stray light, Device simulation

PROCEEDINGS ARTICLE | August 29, 2017

Optical design and simulations of the soft x-ray telescope for Einstein Probe mission

Proc. SPIE. 10399, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VIII

KEYWORDS: Telescopes, Optical design, X-rays, Optical simulations, Spatial resolution, X-ray telescopes

PROCEEDINGS ARTICLE | August 16, 2017

Study on the depolarization of CCl4 Raman spectrum by the parameter of polarizer and analyzer

Proc. SPIE. 10452, 14th Conference on Education and Training in Optics and Photonics: ETOP 2017

KEYWORDS: Polarization, Spectroscopy, Polarizers, Raman spectroscopy, Transmittance

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PROCEEDINGS ARTICLE | May 31, 2017

Development of depth-graded W/Si multilayer mirrors for x-ray focusing telescope application

Proc. SPIE. 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V

KEYWORDS: Telescopes, Mirrors, Multilayers, Polarization, Argon, Sputter deposition, Annealing, X-rays, Interfaces, Reflectivity, Reflector telescopes, Particle accelerators, X-ray telescopes, Protactinium

PROCEEDINGS ARTICLE | May 31, 2017

Study of Pd/Y based multilayers using high energy photoemission spectroscopy combined with x-ray standing waves

Proc. SPIE. 10235, EUV and X-ray Optics: Synergy between Laboratory and Space V

KEYWORDS: Multilayers, X-ray optics, Argon, Sputter deposition, X-rays, Interfaces, Nitrogen, Extreme ultraviolet, Palladium, Photoemission spectroscopy, Chemical elements, Oxidation

PROCEEDINGS ARTICLE | May 11, 2017

Optimizing the effect of electric-field enhancement in nodular defects

Proc. SPIE. 10181, Advanced Optics for Defense Applications: UV through LWIR II

KEYWORDS: Thin films, Multilayers, Finite-difference time-domain method, Silica, Polarization, Laser induced damage, Optical coatings, Polarizers, Computer simulations, Laser damage threshold

SPIE Journal Paper | March 9, 2017

Effects of sputtering parameters and separator plates on the structure and stress of W/Si multilayers in x-ray telescope applications

Qi, Runze , Huang, Qiushi , Yang, Yang , Zhang, Zhong , Wang, Zhanshan

OE Vol. 56 Issue 03

KEYWORDS: Protactinium, Multilayers, Interfaces, Sputter deposition, X-ray telescopes, Reflectivity, Mirrors, Argon, X-rays, Space telescopes

PROCEEDINGS ARTICLE | January 26, 2017

eXTP: Enhanced X-ray Timing and Polarization mission

Proc. SPIE. 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray

KEYWORDS: Observatories, Astronomy, Stars, Polarization, Sensors, X-rays, Magnetism, Physics, Polarimetry, Astrophysics

eXTP is a science mission designed to study the state of matter under extreme conditions of density, gravity and magnetism. Primary goals are the determination of the equation of state of matter at supra-nuclear density, the measurement of QED effects in highly magnetized star, and the study of accretion in the strong-field regime of gravity. Primary targets include isolated and binary neutron stars, strong magnetic field systems like magnetars, and stellar-mass and supermassive black holes. The mission carries a unique and unprecedented suite of state-of-the-art scientific instruments enabling for the first time ever the simultaneous spectral-timing-polarimetry studies of cosmic sources in the energy range from 0.5-30 keV (and beyond). Key elements of the payload are: the Spectroscopic Focusing Array (SFA) - a set of 11 X-ray optics for a total effective area of ∼0.9 m² and 0.6 m² at 2 keV and 6 keV respectively, equipped with Silicon Drift Detectors offering <180 eV spectral resolution; the Large Area Detector (LAD) - a deployable set of 640 Silicon Drift Detectors, for a total effective area of ∼3.4 m², between 6 and 10 keV, and spectral resolution better than 250 eV; the Polarimetry Focusing Array (PFA) – a set of 2 X-ray telescope, for a total effective area of 250 cm² at 2 keV, equipped with imaging gas pixel photoelectric polarimeters; the Wide Field Monitor (WFM) - a set of 3 coded mask wide field units, equipped with position-sensitive Silicon Drift Detectors, each covering a 90 degrees x 90 degrees field of view. The eXTP international consortium includes major institutions of the Chinese Academy of Sciences and Universities in China, as well as major institutions in several European countries and the United States. The predecessor of eXTP, the XTP mission concept, has been selected and funded as one of the so-called background missions in the Strategic Priority Space Science Program of the Chinese Academy of Sciences since 2011. The strong European participation has significantly enhanced the scientific capabilities of eXTP. The planned launch date of the mission is earlier than 2025.

SPIE Journal Paper | December 8, 2016

Electric-field intensity enhancement of a series of artificial nodules in a broadband high-reflection coating

Ma, Hongping , Cheng, Xinbin , Zhang, Jinlong , Ma, Bin , Jiao, Hongfei , Wang, Zhanshan , Li, Tongbao , Yu, Jin , Kang, Zhijun , Tang, Yongjian

OE Vol. 56 Issue 01

KEYWORDS: Coating, Hybrid fiber optics, High reflection coatings, Laser induced damage, Refractive index, Optical engineering, Laser damage threshold, Diffraction, Lithium, Resistance

PROCEEDINGS ARTICLE | December 6, 2016

Nanosecond laser-induced damage of high-reflection coatings: NUV through NIR

Proc. SPIE. 10014, Laser-Induced Damage in Optical Materials 2016

KEYWORDS: Near infrared, Refractive index, Reflection, Laser induced damage, Resistance, Optical coatings, Laser welding, Hybrid fiber optics, High reflection coatings, Laser systems engineering

PROCEEDINGS ARTICLE | October 25, 2016

High accuracy measurement of power spectral density in middle spatial frequency range of optical surfaces using optical profiler

Proc. SPIE. 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics

KEYWORDS: Spatial frequencies, Scattering, Calibration, Digital filtering, Interference (communication), Time metrology, Objectives, Fractal analysis, Optical resolution, Spatial resolution

SPIE Journal Paper | October 14, 2016

Improving the surface metrology accuracy of optical profilers by using multiple measurements

Xu, Xudong , Huang, Qiushi , Shen, Zhengxiang , Wang, Zhanshan

OE Vol. 55 Issue 10

KEYWORDS: Spatial frequencies, Error analysis, Metrology, Interference (communication), Optical testing, Fractal analysis, Calibration, Optical engineering, Silica, Spatial resolution

PROCEEDINGS ARTICLE | September 15, 2016

Developing an EUV multilayer adaptive mirror: the first results

Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI

KEYWORDS: Actuators, Mirrors, Multilayers, Imaging systems, Reflectivity, Image resolution, Wavefronts, Adaptive optics, Extreme ultraviolet, Spherical lenses

PROCEEDINGS ARTICLE | September 15, 2016

Development of MoSi2/Si lamellar multilayer grating for the narrowband soft x-ray monochromator

Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI

KEYWORDS: Mirrors, X-rays, Silicon, Reflectivity, Imaging spectroscopy, Spectral resolution, Monochromators, Plasma diagnostics, Plasma, Diffraction gratings

PROCEEDINGS ARTICLE | September 15, 2016

Development of a high-energy Kirkpatrick Baez microscope

Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI

KEYWORDS: Microscopes, Mirrors, Optical design, Multilayers, X-rays, Reflectivity, Spatial resolution, X-ray imaging, Grazing incidence, Spherical lenses

PROCEEDINGS ARTICLE | September 15, 2016

Structure of Ru/B4C multilayer for high-flux monochromator application

Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI

KEYWORDS: Multilayers, Sputter deposition, Crystals, X-rays, Interfaces, Reflectivity, Synchrotron radiation, Monochromators, Hard x-rays, Ruthenium

PROCEEDINGS ARTICLE | September 15, 2016

Design of KB complex type microscope for ICF x-ray diagnostics

Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI

KEYWORDS: Microscopes, Monochromatic aberrations, Mirrors, Imaging systems, X-rays, Reflectivity, Diagnostics, Spatial resolution, X-ray imaging, Fusion energy

PROCEEDINGS ARTICLE | September 8, 2016

Subaperture stitching interferometry with reduced reference errors for ultrasmooth surfaces

Proc. SPIE. 9962, Advances in Metrology for X-Ray and EUV Optics VI

KEYWORDS: X-ray optics, Scattering, Calibration, Error analysis, X-rays, Interferometry, Optical testing, Time metrology, Objectives, Stitching interferometry

PROCEEDINGS ARTICLE | July 18, 2016

Multilayer coating of XTP telescope mirrors

Proc. SPIE. 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Mirrors, Sensors, X-rays, Coating, Reflectivity, Vignetting, Stray light, X-ray telescopes, X-ray telescopes, Off axis mirrors

PROCEEDINGS ARTICLE | July 18, 2016

Development of x-ray multilayer telescope optics for XTP mission

Proc. SPIE. 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray

KEYWORDS: Eye, X-ray optics, Reflection, Microchannel plates, X-rays, Manufacturing, Spatial resolution, X-ray imaging, Spherical lenses, X-ray telescopes, X-ray telescopes

PROCEEDINGS ARTICLE | July 11, 2016

Development of manufacture of mirror glass substrate for x-ray timing and polarization observatory

Proc. SPIE. 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray

KEYWORDS: Observatories, Mirrors, Polishing, Interferometers, Glasses, X-rays, Laser scanners, Computer generated holography, Space telescopes, X-ray telescopes

PROCEEDINGS ARTICLE | May 2, 2016

Multilayers for EUV, soft x-ray and x-ray optics

Proc. SPIE. 9747, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications IX

KEYWORDS: Microscopes, Multilayers, X-ray optics, X-rays, Copper, Interfaces, Nitrogen, Optical coatings, Reflectivity, Extreme ultraviolet, Plasma

SPIE Journal Paper | February 18, 2016

Sparse subaperture stitching method for measuring large aperture planar optics

Xu, Xudong , Shen, Zhengxiang , Tong, Guangde , Wang, Zhanshan

OE Vol. 55 Issue 02

KEYWORDS: Polishing, Error analysis, Optics manufacturing, Optical components, Surface finishing, Optical engineering, Photovoltaics, Interferometry, Time metrology, National Ignition Facility

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PROCEEDINGS ARTICLE | October 2, 2015

Testing multilayer-coated polarizing mirrors for the LAMP soft X-ray telescope

Proc. SPIE. 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII

KEYWORDS: Mirrors, Multilayers, Polarization, Argon, Glasses, X-rays, Nickel, Silicon, Lamps, Reflectivity

PROCEEDINGS ARTICLE | September 23, 2015

The normal-incidence multilayered diffraction grating for the high resolution astrophysical extreme ultraviolet spectroscopy

Proc. SPIE. 9627, Optical Systems Design 2015: Advances in Optical Thin Films V

KEYWORDS: Diffraction, Mirrors, Optical design, Multilayers, Spectroscopy, Reflectivity, Spectral resolution, Extreme ultraviolet, UV-Vis spectroscopy, Diffraction gratings

PROCEEDINGS ARTICLE | September 23, 2015

Structual and optical performance of Pd/B4C working from 7.5nm to 12nm

Proc. SPIE. 9627, Optical Systems Design 2015: Advances in Optical Thin Films V

KEYWORDS: Mirrors, Multilayers, Argon, Sputter deposition, X-rays, Interfaces, Nitrogen, Reflectivity, Extreme ultraviolet, Boron

PROCEEDINGS ARTICLE | September 4, 2015

High efficiency carbon-based multilayers for LAMP at 250 eV

Proc. SPIE. 9603, Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII

KEYWORDS: Carbon, Mirrors, Multilayers, Sputter deposition, Glasses, X-rays, Nickel, Nitrogen, Lamps, Reflectivity

PROCEEDINGS ARTICLE | August 24, 2015

LAMP: a micro-satellite based soft x-ray polarimeter for astrophysics

Proc. SPIE. 9601, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XIX

KEYWORDS: Mirrors, Stars, Polarization, Sensors, Photons, X-rays, Lamps, Magnetism, Polarimetry, Electroluminescent displays

PROCEEDINGS ARTICLE | May 12, 2015

Optical and structural characterization of CeO2/B4C multilayers near boron K-edge energy

Proc. SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV

KEYWORDS: Multilayers, X-rays, Interfaces, Diffusion, Reflectivity, Scanning electron microscopy, Extreme ultraviolet, Boron, Extreme ultraviolet lithography, Grazing incidence

PROCEEDINGS ARTICLE | May 12, 2015

Periodic Co/C, Cr/C, and CoCr/C soft x-ray multilayers prepared by N reactive sputtering

Proc. SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV

KEYWORDS: Multilayers, Light sources, Diamond, Sensors, Sputter deposition, X-rays, Nitrogen, Lamps, Reflectivity, Grazing incidence

PROCEEDINGS ARTICLE | May 12, 2015

Development of XUV multilayer gratings with high resolution and high efficiency

Proc. SPIE. 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV

KEYWORDS: Diffraction, Mirrors, Multilayers, Crystals, Interfaces, Silicon, Reflectivity, Extreme ultraviolet, Polarizability, Diffraction gratings

PROCEEDINGS ARTICLE | November 6, 2014

Design of hard x-ray focusing telescope with a large field-of-view

Proc. SPIE. 9272, Optical Design and Testing VI

KEYWORDS: Telescopes, Mirrors, Stars, Satellites, X-rays, Optical instrument design, X-ray astronomy, X-ray telescopes, Hard x-rays, Off axis mirrors

PROCEEDINGS ARTICLE | November 6, 2014

Measurement of radius of curvature of spherical optical surfaces with small curvature and aperture by optical profiler

Proc. SPIE. 9272, Optical Design and Testing VI

KEYWORDS: Microscopes, Mirrors, Optical design, Error analysis, X-rays, Diagnostics, Optical testing, X-ray imaging, Spherical lenses, Fusion energy

SPIE Journal Paper | October 6, 2014

_{Ultrasonic cleaning optimization research for ultrasmooth optical substrate with artificial micron/submicron silica spheres}

Ding, Tao , Xie, Yujiang , Shen, Zhenxiang , Cheng, Xinbing , Wang, Zhanshan

OE Vol. 53 Issue 12

KEYWORDS: Ultrasonics, Optical spheres, Particles, Silica, Cavitation, Optical engineering, Ultrasonography, Microscopes, Optics manufacturing, Atomic force microscopy

PROCEEDINGS ARTICLE | July 24, 2014

Development of the depth-graded multilayers for XTP mission

Proc. SPIE. 9144, Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Multilayers, Stars, Polarization, Sensors, Glasses, X-rays, Reflectivity, Physics, Space telescopes

PROCEEDINGS ARTICLE | July 24, 2014

Development of the x-ray timing and polarization telescope optics

Proc. SPIE. 9144, Space Telescopes and Instrumentation 2014: Ultraviolet to Gamma Ray

KEYWORDS: Telescopes, Multilayers, X-ray optics, Polarization, Glasses, X-rays, Reflectivity, Space telescopes, Epoxies, X-ray telescopes

SPIE Journal Paper | May 21, 2014

Large-field high-resolution Kirkpatrick–Baez amélioré-Kirkpatrick–Baez mixed microscope for multi-keV time-resolved x-ray imaging diagnostics of laser plasma

Yi, Shengzhen , Mu, Baozhong , Wang, Xin , Zhang, Zhong , Zhu, Jingtao , Wang, Zhanshan , He, Pengfei , Cao, Zhurong , Dong, Jianjun , Liu, Shenye , Ding, Yongkun

OE Vol. 53 Issue 05

KEYWORDS: Microscopes, X-rays, Mirrors, X-ray imaging, Spatial resolution, Reflectivity, Multilayers, Diagnostics, Solids, Plasma

PROCEEDINGS ARTICLE | December 16, 2013

Structural characterization of multilayer using the analysis combining GIXRF with GIXRR method

Proc. SPIE. 9068, Eighth International Conference on Thin Film Physics and Applications

KEYWORDS: Scattering, Luminescence, X-rays, Nickel, Interfaces, Silicon, Reflectivity, Grazing incidence, Compton scattering, X-ray fluorescence spectroscopy

SPIE Journal Paper | November 12, 2013

Laser-damage growth characteristics of fused silica under 1064- and 532-nm laser irradiation

Ma, Bin , Ma, Hongping , Jiao, Hongfei , Cheng, Xinbin , Wang, Zhanshan

OE Vol. 52 Issue 11

KEYWORDS: Laser irradiation, Silica, Laser induced damage, Absorption, Optical engineering, Thermal effects, Laser damage threshold, Polishing, Plasma, Laser systems engineering

PROCEEDINGS ARTICLE | May 3, 2013

Thermal effects on Co/Mo2C multilayer mirrors studied by soft x-ray standing wave enhanced photoemission spectroscopy

Proc. SPIE. 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III

KEYWORDS: Mirrors, Modulation, Spectroscopy, Annealing, X-rays, Interfaces, Reflectivity, Cobalt, Photoemission spectroscopy, Molybdenum

PROCEEDINGS ARTICLE | May 3, 2013

Optical performance, structure, and thermal stability of Al/Zr multilayers working at above 17nm

Proc. SPIE. 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III

KEYWORDS: Thermography, Multilayers, Interfaces, Silicon, Reflectivity, Surface roughness, Extreme ultraviolet, Aluminum, Deposition processes, Zirconium

PROCEEDINGS ARTICLE | December 18, 2012

Co/Mo2C mirror as studied by x-ray fluorescence and photoelectron spectroscopies induced by x-ray standing waves

Proc. SPIE. 8550, Optical Systems Design 2012

KEYWORDS: Multilayers, Signal attenuation, Luminescence, X-rays, Interfaces, Reflectivity, Cobalt, Photoemission spectroscopy, Molybdenum, X-ray fluorescence spectroscopy

PROCEEDINGS ARTICLE | December 18, 2012

Investigation of the x-ray reflectivity of the Co/Mo2C system upon thermal treatment

Proc. SPIE. 8550, Optical Systems Design 2012

KEYWORDS: Multilayers, X-ray optics, Sputter deposition, Annealing, X-rays, Interfaces, Reflectivity, Extreme ultraviolet, Synchrotron radiation, EUV optics

PROCEEDINGS ARTICLE | October 19, 2012

Improved thermal stability of Mg/Co multilayer by introducing Zr barrier layer

Proc. SPIE. 8501, Advances in Metrology for X-Ray and EUV Optics IV

KEYWORDS: Mirrors, Magnesium, Annealing, X-rays, Interfaces, Reflectivity, Extreme ultraviolet, Synchrotron radiation, Grazing incidence, Zirconium

PROCEEDINGS ARTICLE | October 16, 2012

Fabrication of supersmooth optical elements with low surface and subsurface damage

Proc. SPIE. 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

KEYWORDS: Fabrication, Optical components, Polishing, Image processing, Particles, Surface roughness, Ultrasonics, Abrasives, Optics manufacturing, Surface finishing

PROCEEDINGS ARTICLE | October 15, 2012

Effect of wet chemical treatment on BK-7 substrate

Proc. SPIE. 8420, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical System Technologies for Manufacturing and Testing

KEYWORDS: Contamination, Etching, Glasses, Particles, Silicon, Hydrogen, Surface roughness, Atomic force microscopy, Chemical reactions, Semiconducting wafers

PROCEEDINGS ARTICLE | October 15, 2012

A global sub-aperture stitching algorithm and its precision evaluation

Proc. SPIE. 8417, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

KEYWORDS: Optical components, Interferometers, Calibration, Inspection, Physics, Optical testing, Space telescopes, Stitching interferometry, Evolutionary algorithms, Resolution enhancement technologies

SPIE Journal Paper | September 26, 2012

Separation of interface and volume absorption in HfO2 single layers

Lu, Jiangtao , Cheng, Xinbin , Wang, Zhanshan , Liu, Huasong

OE Vol. 51 Issue 12

KEYWORDS: Absorption, Interfaces, Hybrid fiber optics, Thin films, Optical engineering, Thin film coatings, Refractive index, Atrial fibrillation, Laser beam diagnostics, Reflection

PROCEEDINGS ARTICLE | September 17, 2012

Tolerance analysis on nested conical Wolter-I x-ray telescope

Proc. SPIE. 8443, Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray

KEYWORDS: Point spread functions, Mirrors, Sensors, Image quality, Zernike polynomials, Optical alignment, Spatial resolution, X-ray telescopes, Tolerancing, Device simulation

PROCEEDINGS ARTICLE | May 5, 2012

Nanoscale patterns made by using a 13.5-nm Schwarzschild objective and a laser produced plasma source

Proc. SPIE. 8430, Optical Micro- and Nanometrology IV

KEYWORDS: Microscopes, Monochromatic aberrations, Mirrors, Luminescence, Crystals, Image resolution, Laser induced fluorescence, Objectives, Extreme ultraviolet, Plasma

PROCEEDINGS ARTICLE | November 23, 2011

Using engineered defects to study laser-induced damage in optical thin films with nanosecond pulses

Proc. SPIE. 8190, Laser-Induced Damage in Optical Materials: 2011

KEYWORDS: Reflectors, Thin films, Silica, Chemical species, Laser induced damage, Ions, Resistance, Aluminum, Laser optics, Absorption

PROCEEDINGS ARTICLE | October 5, 2011

Using monodisperse SiO2 microspheres to study laser-induced damage of nodules in HfO2/SiO2 high reflectors

Proc. SPIE. 8168, Advances in Optical Thin Films IV

KEYWORDS: Reflectors, Thin films, Multilayers, Silica, Laser induced damage, Particles, Coating, Resistance, Pulsed laser operation, Absorption

PROCEEDINGS ARTICLE | October 5, 2011

Mg-based multilayers and their thermal stabilities for EUV range

Proc. SPIE. 8168, Advances in Optical Thin Films IV

KEYWORDS: Mirrors, Multilayers, Magnesium, Sputter deposition, Annealing, X-rays, Resistance, Reflectivity, Extreme ultraviolet, Synchrotron radiation

PROCEEDINGS ARTICLE | October 5, 2011

Optical, chemical, depth, and magnetic characterization of Mg/Co-based nanometric periodic multilayers

Proc. SPIE. 8168, Advances in Optical Thin Films IV

KEYWORDS: Magnesium, Chemical species, Interfaces, Reflectivity, Magnetism, Cobalt, Scanning electron microscopy, Extreme ultraviolet, Grazing incidence, Zirconium

SPIE Journal Paper | August 1, 2011

Investigation of direct replication techniques on periodic multilayers

Wang, Fangfang , Yang, Xiajun , Jin, Huijun , Huang, Qiushi , Jiang, Li , Zhou, Sika , Zhu, Jingtao , Mu, Baozhong , Wang, Zhanshan

OE Vol. 50 Issue 08

KEYWORDS: Multilayers, Reflectivity, Glasses, Epoxies, Mirrors, Surface roughness, Atomic force microscopy, X-rays, Gemini Planet Imager, Interferometers

PROCEEDINGS ARTICLE | February 18, 2011

Multilayer optics and applications in EUV and x-ray region

Proc. SPIE. 7995, Seventh International Conference on Thin Film Physics and Applications

KEYWORDS: Diffraction, Mirrors, Multilayers, X-ray optics, Polishing, X-rays, Reflectivity, Extreme ultraviolet, Zone plates, Hard x-rays

SPIE Conference Volume | February 16, 2011

Seventh International Conference on Thin Film Physics and Applications

PROCEEDINGS ARTICLE | December 2, 2010

LIDT of HfO2/SiO2 HR films by different test modes at 1064nm and 532nm

Proc. SPIE. 7842, Laser-Induced Damage in Optical Materials: 2010

KEYWORDS: Reflectors, Microscopes, Electron beams, Silica, Laser induced damage, Inspection, Reflectivity, Raster graphics, Laser damage threshold, Absorption

PROCEEDINGS ARTICLE | December 1, 2010

Study of laser induced damage of high reflector at 1064 nm

Proc. SPIE. 7842, Laser-Induced Damage in Optical Materials: 2010

KEYWORDS: Reflectors, Silica, Laser induced damage, Surface roughness, Atomic force microscopy, Oxygen, Raster graphics, Laser damage threshold, Hafnium, Absorption

PROCEEDINGS ARTICLE | November 29, 2010

Laser damage resistance of dichroic mirrors at 532nm and 1064nm

Proc. SPIE. 7842, Laser-Induced Damage in Optical Materials: 2010

KEYWORDS: Mirrors, Polishing, Silica, Polarization, Laser induced damage, Interfaces, Resistance, Transmittance, Raster graphics, Pulsed laser operation

PROCEEDINGS ARTICLE | October 6, 2010

Stress analysis of Mo, MoSi2 and Si mono-layer thin films and multilayers prepared by magnetron sputtering

Proc. SPIE. 7802, Advances in X-Ray/EUV Optics and Components V

KEYWORDS: Thin films, Mirrors, Multilayers, X-ray optics, Sputter deposition, X-rays, Silicon, Silicon films, Molybdenum, Stress analysis

PROCEEDINGS ARTICLE | September 2, 2010

Large-field high-energy KB microscope with aperiodic multilayer

Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III

KEYWORDS: Microscopes, Mirrors, Multilayers, X-rays, Copper, Reflectivity, Diagnostics, Image resolution, X-ray imaging, Fusion energy

PROCEEDINGS ARTICLE | August 25, 2010

Study of 18.2-nm Schwarzschild microscope for plasma diagnostics

Proc. SPIE. 7801, Advances in Metrology for X-Ray and EUV Optics III

KEYWORDS: Optical components, Microscopes, Mirrors, Multilayers, Copper, Reflectivity, Objectives, Spatial resolution, Plasma diagnostics, Plasma

PROCEEDINGS ARTICLE | September 29, 2009

Focusing of hard x-rays with spherical compound refractive lens

Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII

KEYWORDS: X-ray optics, X-rays, Scintillators, Fourier transforms, Microlens, Epoxies, Synchrotron radiation, Spherical lenses, Hard x-rays, Absorption

PROCEEDINGS ARTICLE | September 29, 2009

Focusing of hard x-rays with SU-8 resist planar parabolic refractive lenses

Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII

KEYWORDS: Lithography, Lenses, Sensors, X-rays, X-ray diffraction, Scintillators, Lens design, Ray tracing, Synchrotron radiation, Hard x-rays

PROCEEDINGS ARTICLE | September 9, 2009

1D-KBA microscope using double-periodic multilayer

Proc. SPIE. 7448, Advances in X-Ray/EUV Optics and Components IV

KEYWORDS: Microscopes, Mirrors, X-rays, Reflectivity, Diagnostics, Image resolution, X-ray imaging, Grazing incidence, Fusion energy, Absorption

PROCEEDINGS ARTICLE | August 31, 2009

Space environment experiments of SiC/Mg multilayer for astronomical observation

Proc. SPIE. 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV

KEYWORDS: Mirrors, Multilayers, Astronomy, Magnesium, Sputter deposition, Reflectivity, Extreme ultraviolet, Gamma radiation, Synchrotron radiation, Silicon carbide

PROCEEDINGS ARTICLE | August 5, 2009

Design of supermirrors for hard x-ray telescopes

Proc. SPIE. 7385, International Symposium on Photoelectronic Detection and Imaging 2009: Terahertz and High Energy Radiation Detection Technologies and Applications

KEYWORDS: Multilayers, Genetic algorithms, X-rays, Interfaces, Diffusion, Reflectivity, Optimization (mathematics), X-ray telescopes, Hard x-rays, Absorption

PROCEEDINGS ARTICLE | April 30, 2009

Angle alignment method for soft x-ray using double-periodic multilayer

Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space

KEYWORDS: Zemax, Microscopes, Mirrors, X-ray optics, X-rays, Reflectivity, Diagnostics, Geometrical optics, X-ray imaging, Grazing incidence

PROCEEDINGS ARTICLE | April 30, 2009

An auxiliary visible imaging method for alignment of x-ray Kirkpatrick-Baez optics

Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space

KEYWORDS: Microscopes, Mirrors, X-ray optics, Imaging systems, X-rays, Diagnostics, Lens design, Optical alignment, X-ray imaging, Grazing incidence

PROCEEDINGS ARTICLE | April 30, 2009

Imaging properties of a spherical compound refractive x-ray lens

Proc. SPIE. 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space

KEYWORDS: Image processing, X-rays, X-ray sources, Image resolution, Spatial resolution, Synchrotron radiation, Monochromators, X-ray imaging, Spherical lenses, Synchrotron x-ray imaging

PROCEEDINGS ARTICLE | February 17, 2009

Experimental study on the influence of the metal film thickness on surface plasmon resonance biosensors

Proc. SPIE. 7192, Plasmonics in Biology and Medicine VI

KEYWORDS: Gold, Surface plasmons, Sensors, Sputter deposition, Metals, Glasses, Dielectrics, Reflectivity, Chromium, Adhesives

PROCEEDINGS ARTICLE | September 25, 2008

Non-periodic multilayer coatings in EUV, soft x-ray and x-ray range

Proc. SPIE. 7101, Advances in Optical Thin Films III

KEYWORDS: Microscopes, Mirrors, Multilayers, Polarization, X-rays, Reflectivity, Wave plates, Extreme ultraviolet, Synchrotron radiation, Grazing incidence

PROCEEDINGS ARTICLE | September 25, 2008

Optical and structural properties of Nb_xSi_yO composite films prepared by metallic co-sputtering process

Proc. SPIE. 7101, Advances in Optical Thin Films III

KEYWORDS: Gradient-index optics, Refractive index, Antireflective coatings, Multilayers, Silica, Sputter deposition, Composites, Silicon, Coating, Niobium

PROCEEDINGS ARTICLE | September 3, 2008

Development of EUV multilayer mirrors for astronomical observation in IPOE

Proc. SPIE. 7077, Advances in X-Ray/EUV Optics and Components III

KEYWORDS: Mirrors, Astronomy, Sputter deposition, Glasses, Crystals, Reflectivity, Extreme ultraviolet, Synchrotron radiation, Solar radiation, Magnetosphere

PROCEEDINGS ARTICLE | March 11, 2008

Extreme ultraviolet multilayer mirrors for astronomical observation

Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications

KEYWORDS: Mirrors, Multilayers, Astronomy, Sputter deposition, Silicon, Reflectivity, Extreme ultraviolet, Synchrotron radiation, Magnetosphere, Absorption

PROCEEDINGS ARTICLE | November 14, 2007

Fabrication of supersmooth surfaces with low subsurface damage

Proc. SPIE. 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

KEYWORDS: Refractive index, Polishing, Silica, Etching, Surface roughness, Nondestructive evaluation, Optical testing, Wet etching, Abrasives, Surface finishing

PROCEEDINGS ARTICLE | November 14, 2007

Fabrication of flat and supersmooth surfaces with bowl-feed polishing process

Proc. SPIE. 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

KEYWORDS: Optical components, Mirrors, Polishing, Silica, Interferometers, Microscopy, Surface roughness, Physics, Abrasives, Surface finishing

PROCEEDINGS ARTICLE | November 14, 2007

Design and fabrication of x-ray Kirkpatrick-Baez microscope for ICF

Proc. SPIE. 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

KEYWORDS: Microscopes, Mirrors, Optical design, Multilayers, Imaging systems, X-rays, Tungsten, Reflectivity, Spatial resolution, X-ray imaging

PROCEEDINGS ARTICLE | February 1, 2006

Design and fabrication of C/W hard x-ray supermirrors

Proc. SPIE. 6034, ICO20: Optical Design and Fabrication

KEYWORDS: Carbon, Sputter deposition, X-rays, Copper, X-ray diffraction, Interfaces, Diffusion, Reflectivity, Solids, Hard x-rays

PROCEEDINGS ARTICLE | February 1, 2006

Design of soft x-ray multilayer polarizing elements

Proc. SPIE. 6034, ICO20: Optical Design and Fabrication

KEYWORDS: Optical components, Optical design, Multilayers, Polarization, X-rays, Reflectivity, Polarizers, Wave plates, Numerical analysis, Phase shifts

PROCEEDINGS ARTICLE | February 1, 2006

Current research activities in the field of multilayer for EUV, soft x-ray and x-rays in IPOE

Proc. SPIE. 6034, ICO20: Optical Design and Fabrication

KEYWORDS: Multilayers, Beam splitters, Mach-Zehnder interferometers, Polarization, Interferometers, X-rays, Silicon, Reflectivity, Extreme ultraviolet, Plasma

PROCEEDINGS ARTICLE | February 1, 2006

Design and fabrication of W/Si multilayer mirrors for the K-edge of Ti

Proc. SPIE. 6034, ICO20: Optical Design and Fabrication

KEYWORDS: Mirrors, Multilayers, X-ray optics, Sputter deposition, X-rays, X-ray diffraction, Reflectivity, Atomic force microscopy, Grazing incidence, Hard x-rays

PROCEEDINGS ARTICLE | February 1, 2006

Design and fabrication of the broadband x-ray supermirrors

Proc. SPIE. 6034, ICO20: Optical Design and Fabrication

KEYWORDS: Multilayers, Sputter deposition, X-rays, Tungsten, X-ray diffraction, Interfaces, Silicon, Coating, Reflectivity, Transmission electron microscopy

PROCEEDINGS ARTICLE | December 9, 2005

Analyzing tolerance of grazing angle for hard x-ray Kirkpatrick-Baez microscopes

Proc. SPIE. 6024, ICO20: Optical Devices and Instruments

KEYWORDS: Microscopes, Mirrors, Multilayers, X-rays, Reflectivity, Grazing incidence, Tolerancing, Optics manufacturing, Assembly tolerances, Fusion energy

PROCEEDINGS ARTICLE | October 15, 2005

Design of a frequency stabilization system using polarization spectrum in Cr atom lithography

Proc. SPIE. 5962, Optical Design and Engineering II

KEYWORDS: Signal to noise ratio, Lithography, Doppler effect, Polarization, Chemical species, Magnetism, Chromium, Laser stabilization, Laser beam diagnostics, Laser systems engineering

PROCEEDINGS ARTICLE | October 5, 2005

Multilayers for the EUV and soft X-ray region

Proc. SPIE. 5963, Advances in Optical Thin Films II

KEYWORDS: Multilayers, Beam splitters, Polarization, Interferometers, Sputter deposition, X-rays, Silicon, Reflectivity, Extreme ultraviolet, X-ray lasers

PROCEEDINGS ARTICLE | January 5, 2001

Optimization of depth-graded multilayer designs for EUV and x-ray optics

Proc. SPIE. 4145, Advances in X-Ray Optics

KEYWORDS: Mirrors, Multilayers, X-ray optics, X-rays, Optical coatings, Reflectivity, Extreme ultraviolet, Grazing incidence, X-ray telescopes, EUV optics

PROCEEDINGS ARTICLE | November 8, 2000

Design, fabrication, and characterization of broadband multilayer mirrors for EUV optics at normal incidence

Proc. SPIE. 4146, Soft X-Ray and EUV Imaging Systems

KEYWORDS: Diffraction, Mirrors, Multilayers, Sputter deposition, X-rays, X-ray diffraction, Silicon, Reflectivity, Extreme ultraviolet, EUV optics

PROCEEDINGS ARTICLE | December 17, 1998

Large-area transmission grating spectrograph with high collecting efficiency and good spatial resolution

Proc. SPIE. 3443, X-Ray and Ultraviolet Spectroscopy and Polarimetry II

KEYWORDS: Diffraction, Mirrors, Spectrographs, Sensors, X-rays, Spectral resolution, Spatial resolution, Grazing incidence, Plasma, Diffraction gratings

PROCEEDINGS ARTICLE | December 11, 1998

Fabrication and performance of etched multilayer x-ray optics

Proc. SPIE. 3448, Crystal and Multilayer Optics

KEYWORDS: Mirrors, Multilayers, X-ray optics, Holography, Etching, Sputter deposition, X-rays, X-ray diffraction, Zone plates, Diffraction gratings

PROCEEDINGS ARTICLE | October 14, 1997

Laser plasma source for soft x-ray imaging in CIOM

Proc. SPIE. 3157, Applications of X Rays Generated from Lasers and Other Bright Sources

KEYWORDS: Microscopes, Mirrors, Multilayers, Imaging systems, Nd:YAG lasers, Laser scattering, X-ray imaging, Pulsed laser operation, Plasma, Laser systems engineering

PROCEEDINGS ARTICLE | June 20, 1995

Schwarzschild microscope at the wavelength of 18 nm using a laser-produced plasma source

Proc. SPIE. 2515, X-Ray and Extreme Ultraviolet Optics

KEYWORDS: Microscopes, Mirrors, Multilayers, X-ray optics, X-rays, Optical coatings, Reflectivity, X-ray imaging, Spherical lenses, Plasma

Showing 5 of 105 publications

Conference Committee Involvement (9)

Advances in X-Ray/EUV Optics and Components XIII

20 August 2018 | San Diego, California, United States

Advances in X-Ray/EUV Optics and Components XII

8 August 2017 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VII

6 August 2017 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics VI

29 August 2016 | San Diego, California, United States

Advances in Metrology for X-Ray and EUV Optics V

18 August 2014 | San Diego, California, United States

Showing 5 of 9 published special sections

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