Dr. Zhao-Hui Cheng
at Hitachi Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Electron beams, Metrology, Dielectrics, Silicon, Atomic force microscopy, Scanning electron microscopy, Thermal effects, Chemical analysis, Critical dimension metrology, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top