CONFERENCE PROCEEDINGS
Advanced Search
Zhao Meng
at Southwest Institute of Technical Physics
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 13 October 2009 Paper
The evaluation and measurement of AlGaN epitaxial layer with high Al mole fraction
Zhao Meng, Libo Yu, Xiao Li, Qibin Liu, Huiqiang Duan, Chenhui Yu, Changqing Chen
Proceedings Volume 7518, 751813 (2009) https://doi.org/10.1117/12.840465
KEYWORDS: Aluminum, Ultraviolet radiation, Crystals, Metalorganic chemical vapor deposition, Ultraviolet detectors, Diffraction, Sapphire, Visible radiation, Interfaces, Transmittance
Proceedings Article | 13 October 2009 Paper
ICP etching of high Al mole fraction AlGaN
Zhao Meng, Libo Yu, Xiao Li, Qibin Liu, Huiqiang Duan, Chenhui Yu, Changqing Chen
Proceedings Volume 7518, 75180H (2009) https://doi.org/10.1117/12.841195
KEYWORDS: Etching, Aluminum, Reactive ion etching, Plasma, Metalorganic chemical vapor deposition, Argon, Sapphire, Sensors, Photomasks, Physics
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top