Dr. Zhaohui Cheng
at (Kabu) Hitachiseisakusho Chuokenkyusho;Hitachi Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 April 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Gold, Monochromatic aberrations, Aberration correction, Electron beams, Metrology, Fin field effect transistors, Inspection, Scanning electron microscopy, Colorimetry, Extreme ultraviolet

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